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Wave-optical modeling beyond the thin-element-approximation
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DOI：10.1364/OE.24.030188.png)
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Abstract
En 中文
The optical design and analysis of modern micro-optical elements with high index contrasts and large numerical apertures is still challenging, as fast and accurate wave-optical simulations beyond the thin-element-approximation are required. We introduce a modified formulation of the wave-propagation-method and assess its performance in comparison to different beam-propagation-methods with respect to accuracy, required sampling densities, and computational performance. For typical micro-optical components, the wave-propagation-method is found to be considerably faster and more accurate at even lower sampling densities compared to the different beam-propagation-methods. This enables realistic wave-optical simulations beyond the thin-element-approximation for micro-optical components. As an example, the modified wave-propagation-method is applied for in-line holographic measurements of strongly diffracting objects. From a direct comparison of experimental results and corresponding simulations, the geometric parameters of a test object could be retrieved with high accuracy. (C) 2016 Optical Society of America
Keywords:
ANGLE BEAM-PROPAGATION
COMPUTER-GENERATED HOLOGRAMS
LIGHT-PROPAGATION
LENS
SIMULATION
DESIGN
OPERATORS
FIBERS
SCHEME
LASER
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