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Wavefront reconstruction for multi-lateral shearing interferometry using difference Zernike polynomials fitting
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DOI：10.1016/j.optlaseng.2018.02.011.png)
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Abstract
En 中文
For the multi-lateral shearing interferometers (multi-LSIs), the measurement accuracy can be enhanced by estimating the wavefront under test with the multidirectional phase information encoded in the shearing interferogram. Usually the multi-LSIs reconstruct the test wavefront from the phase derivatives in multiple directions using the discrete Fourier transforms (DFT) method, which is only suitable to small shear ratios and relatively sensitive to noise. To improve the accuracy of multi-LSIs, wavefront reconstruction from the multidirectional phase differences using the difference Zemike polynomials fitting (DZPF) method is proposed in this paper. For the DZPF method applied in the quadriwave LSI, difference Zemike polynomials in only two orthogonal shear directions are required to represent the phase differences in multiple shear directions. In this way, the test wavefront can be reconstructed from the phase differences in multiple shear directions using a noise-variance weighted least squares method with almost no extra computational burden, compared with the usual recovery from the phase differences in two orthogonal directions. Numerical simulation results show that the DZPF method can maintain high reconstruction accuracy in a wider range of shear ratios and has much better anti-noise performance than the DFT method. A null test experiment of the quadriwave LSI has been conducted and the experimental results show that the measurement accuracy of the quadriwave LSI can be improved from 0.0054 lambda rms to 0.0029 lambda rms (lambda = 632.8 nm) by substituting the DFT method with the proposed DZPF method in the wavefront reconstruction process. (C) 2018 Elsevier Ltd. All rights reserved.
Keywords:
Lateral shearing interferometry
Fringe analysis
Phase measurement
Wavefront reconstruction
Zemike polynomials
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