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Wavefront-splitting interferometer based on orbital angular momentum beams
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DOI：10.1364/OE.498081.png)
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Orbital angular momentum (OAM) interferometers have attracted great attention in metrology. However, OAM interferometers usually have large sizes and are difficult to align. OAM-based wavefront-splitting interferometer (WSI-OAM) can achieve nano-displacement measurement with compact size and easy to align. In this manuscript, we propose and demonstrate a nano-displacement measurement system based on WSI-OAM. A resolution of 0.1 nm with an uncertainty of 0.013 nm is achieved with measurement accuracy higher than 99.87% and linearity close to 99%. This work offers a practical approach to miniaturize and integrate OAM interferometers in metrology.& COPY; 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
Keyword:
OPTICAL COHERENCE TOMOGRAPHY
期刊
IF:
3.3
论文数:
6.1W
被引数:
14.3W
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