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White-light interferometer without mechanical scanning
DOI:10.1016/j.optlaseng.2019.105800.png)
摘要
En 中文
We introduce an optical 3D sensor that can measure the shape of objects with rough surface. The proposed sensor is based on white-light interferometry but it does not require a mechanical movement of the measured object relative to the measuring device. The output of a fiber optical interferometer is used as the light source for the measuring interferometer. The built-in fiber stretcher changes the optical path difference and replaces the mechanical movement. A focus tunable lens is a part of the imaging system. This lens secures that the measured part of the surface is imaged sharply onto the camera during the measurement process.
Keyword:
White-light interferometry
Fiber stretcher
Electrically tunable lens
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期刊
IF:
3.7
论文数:
7.3K
被引数:
1.7W
机构
引用论文
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