Wide range semiconductor flow sensors

A. Glaninger

doi:10.1016/S0924-4247(00)00370-8

2000-08-01

PRE

DOI：10.1016/S0924-4247(00)00370-8

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摘要

En 中文

Micromachined flow sensors based on thin film germanium thermistors offer high flow sensitivities and short response times. Using the controlled overtemperature scheme, the measurable air flow velocity ranges from +/-0.01 to +/- 200 m/s and the response time to large step changes of the air velocity is less than 20 ms. In the constant power mode, a signal rise time of 1.6 ms has been demonstrated by the application of shock waves. An air flow measuring range from 0.6 ml/h to at least 150 l/h has been achieved, e.g. with a rectangular flow channel of 0.54 mm(2) cross-sectional area. Using a lookup table transformation, a linearized output signal can be obtained within 25 mu s. (C) 2000 Elsevier Science S.A. All rights reserved.

Keyword:

flow measurement

electrocalorimetric flow sensor

thin film thermistor

micromachined sensor

constant overtemperature control

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期刊

Sensors and Actuators A-Physical

IF:

4.9

论文数:

1.5W

被引数:

3.3W

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