.png){kind=icon}
Return
3D multi-energy deconvolution electron microscopy
.png){kind=icon}
PRE
AI
DOI：10.1039/c6nr07991a.png)
.png){kind=icon}
Original request for help.png){kind=icon}
Share.png){kind=icon}
Save
Abstract
En 中文
Three-dimensional (3D) characterization of nanomaterials is traditionally performed by either cross-sectional milling with a focused ion beam (FIB), or transmission electron microscope tomography. While these techniques can produce high quality reconstructions, they are destructive, or require thin samples, often suspended on support membranes. Here, we demonstrate a complementary technique allowing non-destructive investigation of the 3D structure of samples on bulk substrates. This is performed by imaging backscattered electron (BSE) emission at multiple primary beam energies - as the penetration depth of primary electrons is proportional to the beam energy, depth information can be obtained through variations in the beam acceleration. The detected signal however consists of a mixture of the penetrated layers, meaning the structure's three-dimensional geometry can only be retrieved after deconvolving the BSE emission profile from the observed BSE images. This work demonstrates this novel approach by applying a blind source separation deconvolution algorithm to multi-energy acquired BSE images. The deconvolution can thereby allow a 3D reconstruction to be produced from the acquired images of an arbitrary sample, showing qualitative agreement with the true depth structure, as verified through FIB cross-sectional imaging.
Keywords:
BLIND SOURCE SEPARATION
ALPHA-BETA
TOMOGRAPHY
RESOLUTION
IMAGES
DIVERGENCES
OXIDE
SEM
AI Summary
Key information extracted from the uploaded paper, including a brief overview, abstract, background, key highlights, visual analysis, and future outlook.
Journal
IF:
5.1
Papers:
3.0W
Citations:
11.6W
Organization
Cited Papers
ShareSaveShareSaveShareSaveBlind Source Separation Techniques for the Decomposition of Multiply Labeled Fluorescence Images.png)
BIOPHYSICAL JOURNAL
OAAI
BIOPHYSICAL JOURNALIF3.1
OAAIShareSave3D Visualization of the Iron Oxidation State in FeO/Fe3O4 Core-Shell Nanocubes from Electron Energy Loss TomographyNANO LETTERSOAAI
NANO LETTERSIF9.1
OAAIShareSave
View more