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3D-Printed Electrostatic Microactuators for Flexible Microsystems
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DOI：10.1002/adfm.202304991.png)
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Abstract
En 中文
Developing small-scale, lightweight, and flexible devices with integrated microactuators is one of the critical challenges in wearable haptic devices, soft robotics, and microrobotics. In this study, a novel fabrication process that leverages the benefits of 3D printing with two-photon polymerization and flexible printed circuit boards (FPCBs) is presented. This method enables flexible microsystems with 3D-printed electrostatic microactuators, which are demonstrated in a flexible integrated micromirror array and a legged microrobot with a mass of 4 mg. 3D electrostatic actuators on FPCBs are robust enough to actuate the micromirrors while the device is deformed, and they are easily integrated with off-the-shelf electronics. The crawling robot is one of the lightest legged microrobots actuated without external fields, and the legs actuated with 3D electrostatic actuators enable a locomotion speed of 0.27 body length per second. The proposed fabrication framework opens up a pathway toward a variety of highly integrated flexible microsystems.
Keywords:
3D printing
flexible microsystems
microactuators
microrobotics
two-photon polymerization
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