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3D shape from phase errors by using binary fringe with multi-step phase-shift technique
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DOI：10.1016/j.optlaseng.2015.04.014.png)
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Abstract
En 中文
A three-dimensional shape measurement method is presented, which is a uniaxial measurement by measuring phase errors instead of the well-known phase, modulation or contrast. A sequence of exposures are captured by using a multi-step phase-shift technique with the binary fringes. Then the high-accuracy phases can be obtained by using all the exposures, meanwhile, a set of low-accuracy phases can be calculated by dividing those exposures into a set of four-step phase-shift measurements. For each pixel there will be a set of phase errors by subtracting low-accuracy phases from the highaccuracy ones. And the weighted phase error of every pixel can be calculated. Meanwhile the phase error caused by the improperly defocused binary fringes has a unique relationship with the depth z. Therefore, the 3D information of every pixel can be obtained by analyzing the phase errors. It will be promising for a uniaxial measurement, such as deep holes. (C) 2015 Elsevier Ltd. All rights reserved.
Keywords:
Fringe analysis
Uniaxial
Binary defocusing
Three-dimensional sensing
Phase error
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