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A CMOS-compatible heterogeneous interferometer for chip-scale temperature sensing
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DOI：10.1063/5.0128130.png)
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Abstract
En 中文
We report a photonic temperature sensor with enhanced performance in both broad- and narrow-bandwidth optical measurements. The device consists of a heterogeneously integrated Mach-Zehnder interferometer with arms composed of silicon and silicon nitride waveguides whose thermo-optic coefficients differ by an order of magnitude. The waveguides are fabricated in distinct layers of a monolithic device and guide light in a single transverse-electric mode. The resulting small bend radii enable compact sensing of temperatures local to integrated photonic components with a device footprint of 580 x 410 mu m(2). Furthermore, the dual layers of the sensor enable overlaying of the spiral arms of the interferometer over each other or other photonic circuit components. We measure a sensitivity of 324 pm/K, an over threefold enhancement compared to the measurement of an asymmetric Mach-Zehnder constructed of silicon waveguides on the same device. We additionally define a useful figure of merit for the side-of-fringe measurement regime, which uses direct detection of a narrow linewidth laser and show that the reported device is also competitive on this metric. (C) 2022 Author(s)
Keywords:
SILICON-NITRIDE
ENHANCED SENSITIVITY
SENSOR
PHOTONICS
RESONATORS
PLATFORM
POWER