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A method for GSG probe planarization using probe mark visual recognition
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DOI：10.1016/j.measurement.2025.116738.png)
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Abstract
En 中文
Currently, GSG probe planarization depends on operator experience. The mechanism of GSG probe planarization has not been thoroughly studied. This paper attempts to establish the relationship between the probe angle and the area of probe mark, and complete the planarization by eliminating the probe angle. The study demonstrates that the area ratio of the three-pin mark can be used to calculate the angle of the GSG probe. Specifically, the area ratio is inversely proportional to the probe angle; a higher area ratio corresponds to a smaller GSG probe angle. However, under the same GSG probe angle, the overtravel has a great influence on the area ratio of the three-pins mark. Therefore, the relationship between the GSG probe angle and the area ratio of the three-pins mark is studied under the overtravel of 35 mu m. We have proposed the GSG planarization algorithmics can achieve planarization in just two times. Finally, we found that the relationship established at an overtravel of 35 mu m can be used to achieve GSG probe planarization at 20 mu m by introducing a correction coefficient, alpha. When the overtravel for GSG probe planarization differs from that in this study, readers can first attempt to apply a correction coefficient. This approach is much faster than conducting extensive experiments to establish a new relationship model.
Keywords:
GSG probe
Planarization
Probe mark
Algorithm
Journal
IF:
5.6
Papers:
2.1W
Citations:
5.4W
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