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A mode-localized DC electric field sensor
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DOI：10.1016/j.sna.2021.113244.png)
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Abstract
En 中文
This paper reports a DC electric field sensor (EFS) based on the mode localization phenomenon. The EFS consists of 3-degrees-of-freedom weakly coupled resonators (WCRs) and two capacitor arrays that are electrostatically coupled with the WCRs. The capacitor arrays sense the electric field and produce a stiffness perturbation that causes an amplitude ratio change of the WCRs. The EFS is fabricated using a silicon-on-insulator process and evaluated in a vacuum chamber. The amplitude ratio of the resonators changes from 2.2 to 7.5 as the electric field strength ranges from 0 to 7 kV/m, with a sensitivity of 0.76 /(kV/m). The noise, resolution, and stability of the mode-localized EFS are 11.5 (V/m)/root Hz, 22.9 V/m, and 9.1 V/m, respectively, which are competitive compared with that of other high-performance micromachined EFS. (c) 2021 Elsevier B.V. All rights reserved.
Keywords:
Electric field sensor
Mode localization
Weakly coupled resonators
Amplitude ratio
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