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A Monolithically Integrated Multisensor Platform
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DOI：10.1109/JSEN.2016.2593698.png)
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Abstract
En 中文
The integration of multiple sensors on a single substrate is reported in this paper. A test chip was designed using the integration platform that implemented a capacitive inertial sensor, a capacitive absolute pressure sensor, a resistive temperature sensor, and a capacitive microphone. The sensors were tested after fabrication with the measured acceleration sensitivity of 10 fF/g for a full scale acceleration of 2 g and the pressure sensor sensitivity of 10 fF/KPa for a full scale pressure of 1 atm. Temperature sensor and microphone were also electrically tested.
Keywords:
Sensor integration
multiple sensor integration
integrated sensors
MEMS sensor integration
arrayed sensors
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