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A new method for aspherical surface fitting with large-volume datasets
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DOI：10.1016/j.precisioneng.2014.06.004.png)
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Abstract
En 中文
In the framework of form characterization of aspherical surfaces, European National Metrology Institutes (NMIs) have been developing ultra-high. precision machines having the ability to measure aspherical lenses with an uncertainty of few tens of nanometers. The fitting of the acquired aspherical datasets onto their corresponding theoretical model should be achieved at the same level of precision. In this article, three fitting algorithms are investigated: the Limited memory-Broyden-Fletcher-Goldfarb-Shanno (L-BFGS), the Levenberg-Marquardt (LM) and one variant of the Iterative Closest Point (ICP). They are assessed based on their capacities to converge relatively fast to achieve a nanometric level of accuracy, to manage a large volume of data and to be robust to the position of the data with respect to the model. Nevertheless, the algorithms are first evaluated on simulated datasets and their performances are studied. The comparison of these algorithms is extended on measured datasets of an aspherical lens. The results validate the newly used method for the fitting of aspherical surfaces and reveal that it is well adapted, faster and less complex than the LM or ICP methods. (C) 2014 Elsevier Inc. All rights reserved.
Keywords:
Aspherical surface fitting
Form metrology
Large data
Limited memory BFGS
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