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A Polyimide Based Force Sensor Fabricated Using Additive Screen-Printing Process for Flexible Electronics
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DOI：10.1109/ACCESS.2020.3037703.png)
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Abstract
En 中文
A flexible capacitive force sensor was developed for force sensing applications. The force sensor consists of two electrodes and a dielectric layer. The electrodes were fabricated by depositing conductive silver (Ag) ink on a flexible polyimide platform using screen-printing process. The dielectric layer was prepared by mixing the contents of polydimethylsiloxane (PDMS) (pre-polymer and curing agent) in a 16:1 ratio. Then the PDMS dielectric layer was sandwiched between the screen-printed Ag electrodes. The capability of the fabricated force sensor was investigated by recording its capacitive response for varying applied forces of 100 N. It was observed that the capacitance increased from 5.83 pF to 6.36 pF as the force was increased from 0 N (no load) to 100 N. A sensitivity and correlation coefficient of 0.081%N-1 and 0.998 were calculated for the force sensor. In addition, a response time and recovery time of 3.7 seconds and 5.7 seconds was measured for the fabricated force sensor. The relative humidity (% RH) tests performed from 20% RH to 80% RH, in steps of 20% RH, revealed that there was a minimal effect of RH on the base capacitance of the force sensor at room temperature.
Keywords:
Force sensors
Sensors
Polyimides
Dielectrics
Electrodes
Capacitance
Force
Additive screen-printing process
capacitive based pressure sensor
polyimide substrate
PDMS dielectric layer
flexible
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