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A segmented model based internal model control scheme of electromagnetic micro-mirror systems
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DOI：10.1016/j.isatra.2025.06.003.png)
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Abstract
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• A novel frequency based segmented combination model is proposed to model MEMS micromirrors with rate-dependent hysteresis. • Each sub-model on the segmented frequency sub-band has Hammerstein structure with asymmetric backlash-like hysteresis. • Smoothing factors are introduced into each sub-model to reduce the disturbance caused by model switch between sub-models. • The frequency segmentation points and parameters of the sub-models are determined by optimization techniques. • A segmented internal model control scheme is developed for angle control of MEMS micromirrors with rate-dependent hysteresis.
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