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Acceleration sensitivity in beam-type electrostatic microresonators

delete2007-01-02
delete16
PRE
AI
M
Manu Agarwal *
K
Kwan Kyu Park
S
Saurabh A. Chandorkar
R
Rob N. Candler
B
Bongsang Kim
M
Matthew A. Hopcroft
R
Renata Melamud
T
Thomas W. Kenny
B
Boris Murmann
DOI：10.1063/1.2426884delete
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Abstract

Abstract

En 中文
This letter examines the dependence of the natural frequency in a microelectromechanical resonator on externally applied acceleration. The particular structure studied is an electrostatically coupled, single anchored, double-ended silicon tuning fork. The authrors find that the acceleration dependence in this resonator is primarily due to axial stress on the resonator beams. Measurements show an acceleration sensitivity Delta f/f(0) of 7x10(-9)/g, which is comparable to values found for typical quartz crystal resonators. This result was obtained using dynamic (vibration) measurements, and validated using theoretical analysis and finite element simulations.
Keywords:
OSCILLATORS

Journal

Applied Physics Letters cover
Applied Physics Letters
IF:
3.6
Papers:
10.4W
Citations:
17.8W

Organization

No organization information available