Achieving picometer-level wavefront repeatability with an enhanced environmentally robust point diffraction interferometer

Xiongtao Lv

doi:10.1016/j.optlaseng.2026.109702

Achieving picometer-level wavefront repeatability with an enhanced environmentally robust point diffraction interferometer

2026-02-28

0

PRE

AI

DOI：10.1016/j.optlaseng.2026.109702

Original

Original request for help

Save

Abstract

En 中文

• Robust interferometer achieves picometer repeatability in non-ideal environments. • Custom AOM driver achieves sub-millihertz frequency stability for phase shifting. • Downsampling technique enhances robustness against environmental noise. • Hybrid HEFS-Fourier Algorithm optimizes high-speed sampling processing. • Rigorous validation using various repeatability algorithms.

Keywords:

picometer repeatability

environmental robustness

point diffraction interferometer

sub-millihertz frequency stability

hybrid HEFS-Fourier algorithm

Achieving picometer-level wavefront repeatability with an enhanced environmentally robust point diffraction interferometer

Abstract

Journal

Organization