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Achieving picometer-level wavefront repeatability with an enhanced environmentally robust point diffraction interferometer
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DOI：10.1016/j.optlaseng.2026.109702.png)
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Abstract
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• Robust interferometer achieves picometer repeatability in non-ideal environments. • Custom AOM driver achieves sub-millihertz frequency stability for phase shifting. • Downsampling technique enhances robustness against environmental noise. • Hybrid HEFS-Fourier Algorithm optimizes high-speed sampling processing. • Rigorous validation using various repeatability algorithms.
Keywords:
picometer repeatability
environmental robustness
point diffraction interferometer
sub-millihertz frequency stability
hybrid HEFS-Fourier algorithm
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