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Adaptive Inverse Control Using the Krasnosel’skii-Pokrovskii Model for Hysteresis Compensation in Piezoelectric Flexure Micro-Positioning Stage
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DOI：10.3390/mi17080917.png)
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Abstract
En 中文
Piezoelectric flexure micro-positioning stages are essential micromotion actuators for micro-assembly, atomic force microscopy and nano-manufacturing, but intrinsic hysteresis nonlinearity of piezoelectric stacks distorts the linear voltage-to-displacement mapping and induces significant micro-positioning errors. Conventional hysteresis compensation based on offline-calibrated Krasnosel’skii-Pokrovskii (KP) models cannot adapt to time-varying excitation, whereas state-of-the-art adaptive KP control requires auxiliary dynamic equations and imposes high computational overhead on miniature real-time controllers. To address these limitations, this paper develops a single-degree-of-freedom micromotion positioning device equipped with symmetric two-stage displacement amplification mechanisms and straight circular flexure hinges. ANSYS finite element simulations validate the mechanical stiffness, structural safety and linear amplification characteristic of the micro-positioning stage, achieving a maximum output stroke of 95.95 μm. A discretized KP hysteresis model is constructed to accurately capture the asymmetric rate-dependent hysteresis of piezoelectric stacks. On this basis, a lightweight adaptive inverse control framework is proposed, which realizes online tuning of KP weights through gradient descent iteration only relying on real-time position feedback, eliminating static pre-calibration and extra dynamic correction links. Tracking experiments under 0.1–2 Hz sinusoidal waveforms and 3–7 V variable-amplitude sinusoidal waveforms are implemented. Experimental results show that the proposed approach reduces the root-mean-square error (RMSE) by 7.41–85.65% and the mean absolute percentage error (MAPE) by 7.56–87.81% compared with uncompensated open-loop micromotion control. The combined micro-flexure mechanical design and adaptive hysteresis compensation strategy greatly improves positioning accuracy and anti-interference capacity, offering a low-computation technical route for high-performance micro-positioning systems.
Keywords:
piezoelectric flexure micro-positioning stage
straight circular flexure hinge
two-stage displacement amplifier
Krasnosel’skii-Pokrovskii hysteresis model
adaptive inverse control
hysteresis compensation
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1.3W
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