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Agent-based interbay system control for a single-loop semiconductor manufacturing fab
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DOI：10.1080/09537280600909437.png)
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Abstract
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This study investigates agent-based interbay control of a wafer fabrication facility with a single-loop track. Doing so will simultaneously resolve the production scheduling and vehicle dispatching problems for an interbay over-hoist-transportation system which is commonly employed in the semiconductor manufacturing industry. Two issues are focused on in this study: (i) To design appropriate agent-based control architecture for an interbay system and (ii) to develop a coordination mechanism for the autonomous agents in the interbay system, so that wafer manufacturing tasks can be accomplished efficiently. In this study, we construct a distributed interbay system architecture, in which wafer cassettes, vehicles, and manufacturing cells with stockers are modelled as independent and autonomous agents. This study develops an agent coordination mechanism that is based on a vehicle-initiated contract net protocol. Three types of bidding strategies are proposed and empirically examined via simulation. The performances of the proposed agent-based control mechanism, in terms of cassette sojourn time and throughput, are observed and our experiments have shown promising results.
Keywords:
distributed control
interbay systems
agent-based systems
semiconductor manufacturing
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