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An integrated capacitive sensing method for electrostatic comb-drive micromirrors
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DOI：10.1016/j.sna.2023.114416.png)
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Abstract
En 中文
In this work, a real-time capacitive sensing scheme based on electromechanical amplitude modulation is developed to detect the scanning angle and phase of a uniaxial electrostatic comb-drive micromirror for close loop control. In this scheme, a sine-wave voltage signal superimposed with a high frequency carrier signal is applied to the shared comb drives of the micromirror for both sensing and driving. The driving/sensing circuit is fully analyzed in both frequency and time domain for feedthrough elimination and signal distortion minimiza-tion. Experimental results have shown that using a carrier signal with 2.5 Vpp and 1 MHz, the measurement accuracy of the scanning angle of the micromirror reaches 0.15 degrees and the time delay can be controlled within 0.47 mu s. The effect of the temperature change on the phase response of the micromirror is also investigated for a better understanding of the micromirror's scanning stability. When the temperature changes from 25 degrees C to 35 degrees C, the measured time delay of the micromirror actuated at 3840 Hz changes from 0 to 2.4 mu s. The proposed capacitive sensing scheme can be used to effectively measure the angular position and phase of electrostatic comb-drive MEMS mirrors simultaneously without the need of adding any external components.
Keywords:
MEMS mirror
Micromirror
Comb drive
Electrostatic actuation
Capacitive sensing
Dynamic detection
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