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An integrated gas sensor technology using surface micro-machining
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DOI：10.1016/S0925-4005(01)01064-4.png)
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Abstract
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We report the first silicon based integrated gas sensor technology using surface micro-machined micro-hotplate (MHP). In this work, the thermally isolated hotplate was fabricated using surface silicon micro-machining technique. Various etching window designs for the polysilicon sacrificial etch were also explored to optimize the surface micro-machining process yield. The front-side surface micromachined MHP provide excellent manufacturing yield compared to the bulk micro-machined counterpart and at the same time retains all the desirable thermal characteristics that are essential to the integrated gas sensor application. Integrated gas sensors with sensitivity down to 1 ppm of carbon monoxide were demonstrated using this technology. This approach has been extended to integrated gas sensor array. (C) 2002 Elsevier Science B.V. All rights reserved.
Keywords:
integrated sensor
gas sensor
surface micro-machine
micro-hotplate
carbon monoxide sensor
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