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Angle-resolved annular data acquisition method for microellipsometry

delete2007-01-01
delete33
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OA
AI
S
Sang-Heon Ye *
S
Soo Hyun Kim
Y
Yoon Keun Kwak
H
Hyun Mo Cho
Y
Yong Jai Cho
W
Won Chegal
DOI：10.1364/OE.15.018056delete
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Abstract

Abstract

En 中文
An ellipsometric data acquisition method is introduced to measure the optical properties of sample. It is based on a microellipsometer hardware layout integrated a high numerical aperture objective lens, which is aligned in the normal direction of sample surface. This technique enables to achieve ellipsometric data at multiple incident angle with a sub-mu m probe beam size, moreover real-time measurement is possible due to no moving parts. The experimental results of different SiO2 thin film are demonstrated, also calibration technique is described. (c) 2007 Optical Society of America.
Keywords:
BEAM PROFILE REFLECTOMETRY
IMAGING MICROELLIPSOMETRY
ELLIPSOMETRY
SILICON
MICROSCOPY
RESOLUTION

Journal

Optics Express cover
Optics Express
IF:
3.3
Papers:
6.1W
Citations:
14.3W

Organization

K
korea research institute of standards & science (kriss)
Scholars:
2.0K
Papers: 2.3K
Citations: 1
Cited Papers

Cited Papers

No cited papers available