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Atomic-scale interface engineering for two-dimensional materials based field-effect transistors

delete2023-07-26
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侯翔宇 cover
侯翔宇 (Xiangyu Hou) *
T
Tengyu Jin
Z
Zheng, Yue *
陈威 cover
陈威 (Wei Chen) *
DOI:10.1002/smm2.1236delete
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Abstract

Abstract

En 中文
Two-dimensional (2D) materials with free of dangling bonds have the potential to serve as ideal channel materials for the next generation of field-effect transistors (FETs) due to their atomic-thin and excellent electronic properties. However, the performance of 2D materials-based FETs is still dictated by the interface between electrodes/dielectrics and 2D materials. Several technical challenges such as improving device stability, reducing contact resistance, and advancing mobility need to be overcome. Herein, we focus on the effects of atomic-scale interface engineering on the contact resistance and dielectric layer for 2D FETs. Universal strategies we consider to achieve ohmic contact and develop high-quality, defect-free dielectric layers are provided. Furthermore, advancing the performance of 2D materials-based FETs and binding to silicon substrates are briefly analyzed.
Keywords:
dielectric layers
field-effect transistors
interface engineering
ohmic contact
two-dimensional materials
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SmartMat
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shenzhen university
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National University of Singapore
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