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Bio-inspired fluidic thermal angular accelerometer with inherent linear acceleration rejection
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DOI：10.1016/j.sna.2018.05.037.png)
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Abstract
En 中文
This paper reports on the design, simulation, fabrication and characterization of a bio-inspired angular accelerometer. The sensor mimics the semicircular canals in mammalian vestibular systems. The device pairs a fluid-filled microtorus with a thermal detection principle based on thermal convection. The micro torus is intersected by a set of heaters surrounded with temperature detectors on either side, which sense a temperature profile asymmetry upon applied angular acceleration. The device fabrication is based on a two-mask process. Proper arrangement of four resistive temperature sensors in a Wheatstone bridge reduces the impact of heater-induced buoyancy effects. The toroidal microchannel results in inherent geometric linear acceleration insensitivity. The sensor demonstrates a sensitivity of 124 mu V/deg/s(2) for in-plane angular acceleration, two orders of magnitude suppression of cross-axis angular accelerations, three orders of magnitude suppression of linear accelerations, and a test setup limited dynamic range of +/- 2000 deg/s(2) at 1 Hz. (C) 2018 Elsevier B.V. All rights reserved.
Keywords:
Inertial sensor
Biomimetic
Bio-inspired
Thermal
Angular accelerometer
Gyroscope
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