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Cascade optical coherence tomography (C-OCT)
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DOI：10.1364/OE.394638.png)
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Abstract
En 中文
Significant advances for optical systems in terms of both performance and packaging are enabled by freeform optical components. Yet, surface form metrology for freeform optics remains a challenge. We developed and investigated a point-cloud cascade optical coherence tomography (C-OCT) technique to address this metrology challenge. The mathematical framework for the working principle of C-OCT is presented. A novel detection scheme is developed to enable high-speed measurements. Experimental results validate the C-OCT technique with the prototype setup demonstrating single-point precision of +/- 26 nm (similar to lambda/24 at the He-Ne wavelength), paving the way towards full surface measurements on freeform optical components. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Keywords:
FREEFORM
SPECTROMETER
METROLOGY
SURFACES