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Characterizing Patterned Block Copolymer Thin Films with Soft X-rays
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DOI：10.1021/acsami.7b02791.png)
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Abstract
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The directed self-assembly (DSA) of block copolymers (BCPs) is a potential solution for patterning critical features for integrated circuits at future technology nodes. For this process to be implemented, there needs to be a better understanding of how the template guides the assembly and induces subsurface changes in the lamellar structure. Using a rotational transmission X-ray scattering measurement coupled with soft X-rays to improve contrast between polymer components, the impact of the ratio of the guiding stripe width (W) to the BCP pitch (L-0) was investigated. For W/L-0 < 1, continuous vertical lamella were observed, with some fluctuations in the interface profile near the template that smoothed out further up the structure. Near W/L-0 approximate to 1.5, the arrangement of the lamella shifted, moving from polystyrene centered on the guiding stripe to poly(methyl methacrylate) centered on the guiding stripe.
Keywords:
directed self-assembly
small-angle X-ray scattering block copolymers
soft X-ray
inverse problem
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