.png){kind=icon}
.png){kind=icon}
Return
CMOS Monolithic Electrochemical Gas Sensor Microsystem Using Room Temperature Ionic Liquid
.png){kind=icon}
OA
AI
DOI：10.1109/JSEN.2018.2863644.png)
.png){kind=icon}
.png){kind=icon}
Share.png){kind=icon}
Save
Abstract
En 中文
The growing demand for personal healthcare monitoring requires a challenging combination of performance, size, power, and cost that is difficult to achieve with existing gas sensor technologies. This paper presents a new CMOS monolithic gas sensor microsystem that meets these requirements through a unique combination of electrochemical readout circuits, post-CMOS planar electrodes, and room temperature ionic liquid (RTIL) sensing materials. The architecture and design of the CMOS-RTIL-based monolithic gas sensor are described. The monolithic device occupies less than 0.5 mm(2) per sensing channel and incorporates electrochemical biasing and readout functions with only 1.4 mW of power consumption. Oxygen was tested as an example gas, and results show that the microsystem demonstrates a highly linear response (R-2 = 0.995) over a 0-21% oxygen concentration range, with a limit of detection of 0.06% and a 1 s response time. Monolithic integration reduces manufacturing cost and is demonstrated to improve limits of detection by a factor of five compared to a hybrid implementation. The combined characteristics of this device offer an ideal platform for portable/wearable gas sensing in applications such as air pollutant monitoring.
Keywords:
Monolithic microsystem
room temperature ionic liquid
electrochemical
gas sensor
AI Summary
Key information extracted from the uploaded paper, including a brief overview, abstract, background, key highlights, visual analysis, and future outlook.
Journal
IF:
4.5
Papers:
2.1W
Citations:
7.3W