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Compact single-track absolute capacitive angular displacement sensor with high accuracy
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DOI：10.1016/j.sna.2026.117708.png)
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Abstract
En 中文
• Propose a compact single-track absolute capacitive angular displacement sensor by transforming the parallel capacitor configuration of the CMG and FMG into a circumferentially serial configuration, reducing radial occupation while maintaining high-accuracy absolute angle measurement. • Develop a rotor structure comprising four induction electrode groups evenly distributed on the rotor and applied with the TSIED method to address the impact of signal crosstalk occurring in the splicing region between the FMG and CMG on measurement precision. • Conduct three-dimensional finite-element simulations to design the sensing-electrode parameters and verify the feasibility of the TSIED method for the proposed capacitive angular displacement sensor. • Demonstrate that the prototype sensor fabricated using printed circuit board technology with an outer diameter of 112 mm achieves an FMG repeatability of 3.4″ and a compensated FMG measurement accuracy of ± 6″ over a 360° measurement range.
Keywords:
capacitive angular displacement sensor
absolute angle measurement
signal crosstalk
TSIED method
finite-element simulation
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