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Component and performance evolution of Zr filters induced by annealing and synchrotron radiation in EUV range
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DOI：10.3788/COL202523.033401.png)
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Abstract
En 中文
Freestanding Zr filters are important devices for improving spectral purity in the extreme ultraviolet range of 7-20 nm, and their irradiation resistance directly determines their life and efficiency. We prepared multilayered Zr/B4C and Zr/Si filters using magnetron sputtering. Their transmittance reached a maximum of 23% (lambda =13.5 nm). Microwatt-radiation-induced structural changes in the filters were investigated at the metrology beamline (BL08B) of the National Synchrotron Radiation Laboratory. The aging of the Zr filters was measured and analyzed. The experimental results revealed that the damage was noticeable on the irradiated filter surfaces with different states, suggesting that the main factors causing the degradation of the filters were oxidation and carbon contamination at the surfaces. Furthermore, the thermal stability of the Zr filters was studied by annealing, and the heat accumulation during the damage process was estimated using finite-element numerical simulations and X-ray photoelectron spectroscopy measurements. Silicide formation at the Zr-Si-O system interfaces was found to be key to enhancing the stability of the filters.
Keywords:
extreme ultraviolet
Zr filter
synchrotron radiation
damage
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