.png){kind=icon}
.png){kind=icon}
Return
Compositional metrology of atom probe applied to non-metallic materials
.png){kind=icon}
OA
AI
E
F
L
DOI：10.1016/j.pmatsci.2026.101779.png)
.png){kind=icon}
.png){kind=icon}
Share.png){kind=icon}
Save
Abstract
En 中文
Laser-assisted Atom Probe Tomography (LA-APT) has demonstrated a unique potential for the study of the 3D distribution of atomic species in semiconductor materials and devices, and in a growing list of inorganic non-metallic solids. A crucial and often underestimated issue with APT is its accuracy in compositional measurements of non-metallic systems. This work introduces the principles of APT as an experimental technique, recalling the aspects potentially leading to compositional biases and underlining in particular the role of the surface electric field in governing the different physical–chemical phenomena that enable the measurement. It reviews the possible mechanisms of specific losses, as well as the methods for assessing a compositional bias and proposing possible correction methods. Finally, it establishes a state of the art on compositional biases in APT of non-metallic materials, on the basis of which it will be possible to conclude on specific recommendations for best practices, and the perspective of application of APT to new materials.
Keywords:
Atom probe tomography
Semiconductors
Composition metrology
Field emission
Non-metallic materials
AI Summary
Key information extracted from the uploaded paper, including a brief overview, abstract, background, key highlights, visual analysis, and future outlook.
Journal
IF:
40
Papers:
1.3K
Citations:
3.7W
Organization
Cited Papers