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Computational-sampling-moir?-based on-machine alignment for freeform optics
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DOI：10.1364/OL.485524.png)
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Abstract
En 中文
The manufacturing and characterization of freeform optical surfaces are influenced by their high sensitivity to mis-alignments. In this work, the computational sampling moire technique combined with phase extraction is developed for the precise alignment of freeform optics during fabrication and in metrology applications. This novel, to the best of our knowledge, technique achieves near-interferometry-level precision in a simple and compact configuration. This robust technology can be applied to industrial manufacturing plat-forms (such as diamond turning machines, lithography, and other micro-nano-machining techniques) as well as their metrology equipment. In a demonstration of computational data processing and precision alignment using this method, iterative manufacturing of freeform optical surfaces with a final-form accuracy of about 180 nm was accomplished. (c) 2023 Optica Publishing Group
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