Contactless excitation of acoustic resonance in insulating wafers

doi:10.1063/5.0116478

Contactless excitation of acoustic resonance in insulating wafers

2022-10-04

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DOI：10.1063/5.0116478

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Contactless excitation and detection of high harmonic acoustic overtones in a thin insulator single crystal are described using radio frequency spectroscopy techniques. Single crystal [001] silicon wafer samples were investigated, one side covered with a Nb thin film, the common starting point for the fabrication of quantum devices. The coupling between electromagnetic signals and mechanical oscillation is achieved from the Lorentz force generated by an external magnetic field. This method is suitable for any sample with a metallic surface or covered with a thin metal film. High resolution measurements of the temperature dependence of the sound velocity and elastic constants of silicon are reported and compared with known results. Published under an exclusive license by AIP Publishing.

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Contactless excitation of acoustic resonance in insulating wafers

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