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Deep Learning-Driven Virtual Phase Shifting for Enhanced Interferometric Surface Profiling
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DOI：10.1016/j.precisioneng.2025.10.021.png)
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Abstract
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• Deep learning-based virtual phase shifter for accurate phase retrieval proposed • Accurate π/2-shifted interferograms from a single experimental frame synthesized • Second harmonic distortion incorporated into training for interferogram generation • High phase retrieval accuracy and repeatability under environmental noise achieved • Precise interferometry enabled in practical metrology and industrial environments
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