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Deterministic figuring theory and optimization method based on actively controllable time-variant tool influence function
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DOI：10.1016/j.jmapro.2025.06.110.png)
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Abstract
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• A novel controllable time-varying tool influence function processing method is proposed. • By introducing spatial dimension control of TIF to liberate time dimension constraint • A global optimization algorithm for dwell time distribution with adaptive TIF is established. • CTV-TIF has better figuring ability for the gradient of surface shape error changes rapidly. • The method is general for other sub-aperture polishing methods with TV-TIF.
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