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Dynamic spectroscopic imaging ellipsometry

delete2022-02-22
delete6
PRE
AI
K
Kim, Daesuk *
V
Vamara Dembele
S
Sukhyun Choi
S
Saeid Kheiryzadehkhanghah
S
Saeid Kheiryzadehkhanghah
J
Joo, Chulmin
R
Robert Magnusson
DOI：10.1364/OL.451064delete
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Abstract

Abstract

En 中文
A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Delta(lambda, x) dynamically at a speed of 30Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 x 50 mu m(2) in an hour. (C) 2022 Optica Publishing Group

Journal

Optics Letters cover
Optics Letters
IF:
3.3
Papers:
4.0W
Citations:
7.6W

Organization

U
university of texas system
Scholars:
18.5W
Papers: 15.6W
Citations: 210
J
Jeonbuk National University
Scholars:
1.3W
Papers: 1.3W
Citations: 1.3W
Y
Yonsei University
Scholars:
4.8W
Papers: 4.6W
Citations: 5.2W
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