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Experimental study on subaperture testing with iterative stitching algorithm
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DOI：10.1364/OE.16.004760.png)
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Abstract
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Applying the iterative stitching algorithm, we demonstrate the power of subaperture testing through experiments. Naturally the algorithm applies to flats, spherical or aspheric surfaces. We first apply it to a silicon carbide flat mirror with larger aperture than the interferometer's. The testing results help to obtain a high-precision mirror through five iterations of ion beam figuring. The second experiment is 37-subaperture testing of a large spherical mirror. Good consistence is observed between the stitching result and the full aperture test result using a Zygo interferometer. Finally we study the applicability of the algorithm to subaperture testing of a parabolic surface. The stitching result is consistent with the auto-collimation test result. Furthermore, the surface is tested with annular subapertures and also retrieved by our algorithm successfully. (c) 2008 Optical Society of America.
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3.3
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