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Fabrication Processes of Next-Gen Integrated Circuits through the Lens of In Situ Transmission Electron Microscopy

delete2025-07-25
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Utkur Mirsaidov
DOI：10.1093/mam/ozaf048.738delete
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Abstract

Abstract

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Journal

Microscopy and Microanalysis cover
Microscopy and Microanalysis
IF:
3
Papers:
1.4K
Citations:
6.2K

Organization

N
national university of singapore
Scholars:
4.6K
Papers: 2.4K
Citations: 1