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Figure-error-resilient method for optical system alignment
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DOI：10.1016/j.precisioneng.2026.08.024.png)
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Abstract
En 中文
• Data augmentation enables figure-error-resilient optical alignment.
• Fabrication-tailored figure-error modeling supports practical alignment.
• A single experimental alignment round reduces on-axis WFE RMS from 0.448 λ to 0.087 λ.
Keywords:
Figure error
Optical system alignment
Optical manufacturing
Deep learning
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