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Flexible membrane pressure sensor
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DOI：10.1016/j.sna.2004.10.012.png)
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Abstract
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A new flexible low-pressure sensor design with convention architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible substrate is fabricated. The sensing elements are wired according to a full Wheatstone-bridge layout, to reduce any temperature effects. These low-pressure sensors are subjected to repetitive strains/pressure testing. The experiment demonstrates a linear pressure relationship in the 0-2.0 psi range with a sensitivity of 1.953 +/- 0.020 mV/root psi. The measurements observed are in good agreement with the analytical solution. (c) 2004 Published by Elsevier B.V.
Keywords:
flexible substrate
pressure sensor
membrane
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