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Flexible PZT-Based Row-Column Addressed 2-D PMUT Array
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DOI：10.1109/TUFFC.2024.3465589.png)
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Abstract
En 中文
This article reports a 30 x 12 row-column (RC) addressed flexible piezoelectric micromachined ultrasound transducer (PMUT) array with a top-down fabrication process. The fabrication uses a temporary carrier wafer from which the array device is released by deep reactive ion etching (DRIE). About 0.8-mu m-thick sol-gel processed lead zirconate titanate (PZT) thin film acts as the active piezoelectric. The flexible PMUT membrane includes the PZT film and a 14-mu m polyimide as a passive layer. A sidewall made of polyimide measuring 21 mu m in thickness with a cavity of 100 mu m in diameter is realized by reactive ion etching (RIE). Laser Doppler vibrometer (LDV) characterization of the PMUT indicates 2.7 and 2.1 MHz as the resonance frequency in-air and underwater, respectively. Excitation of a single PMUT element coupled with 5-V direct current (dc) bias results in 1.2-nm/V sensitivity in-air, whereas when the same is excited along with 10V dc bias, a pressure response of 40 Pa/V at 1 cm is measured underwater using a hydrophone. The presented results under bending to an 8-mm bending radius show the potential for wearable applications in shallow-depth regions subject to further optimization.
Keywords:
Ultrasonic imaging
Electrodes
Transducers
Fabrication
Acoustics
Resonant frequency
Polymers
Flexible microsystems
piezo-MEMS
piezoelectric micromachined ultrasound transducer (PMUT)
piezoelectric thin films
processed lead zirconate titanate (PZT)
row-column (RC) addressing
ultrasound transducers
wearable medical devices
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