.png){kind=icon}
.png){kind=icon}
Return
Fluid depth sensor using surface acoustic wave resonator
.png){kind=icon}
PRE
AI
DOI：10.1117/12.3010985.png)
.png){kind=icon}
Original request for help.png){kind=icon}
Share.png){kind=icon}
Save
Abstract
En 中文
Fluid depth measurement finds practical applications across various industries, including petroleum, water treatment processes, nuclear technology, and household appliances. Traditional methods include magnetic, radiation, linear variable differential transformers, LASER, pressure, capacitive, float, conductivity probe, fiber optics, ultrasonic, and triple bubbler sensors. Despite its promising attributes, such as suitability for low to very high-temperature environments, wireless interrogation, battery-less operation, and compact size, the application of piezoelectric Surface Acoustic Wave (SAW) sensors in fluid depth measurement has been comparatively unexplored in the current body of literature. This research presents a depth gauge engineered for fluid depth assessment employing a Surface Acoustic Wave (SAW) resonator. The apparatus comprises a 20 mu m thick aluminum diaphragm, with a quartz SAW resonator affixed to it. Employing an 868 MHz quartz SAW resonator enables the precise measurement of minute depth variations, with a remarkable sensitivity of 532 Hz/mm (equivalent to 0.61 ppm/mm), allowing for accurate detection of changes as small as 1 mm.
Keywords:
Depth gauge
pressure sensor
SAW
strain measurement
Journal
A
IF:
0
Papers:
58
Citations:
0