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Gaussian kernel density functions for compositional quantification in atom probe tomography
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DOI：10.1016/j.matchar.2018.02.033.png)
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Abstract
En 中文
Atom probe tomography (APT) has the ability to identify the nature and position of single atoms in a material with an almost 3D atomic resolution. However, the quantification of the material composition requires an appropriate treatment of the discrete APT data. When the amount of atoms selected to quantify the composition is relatively small, the spatial resolution is enhanced but the statistical error worsens. Conversely, the increase in the number of atoms considered reduces the spatial resolution, but improving the statistics. We have developed a methodology to reach an optimum equilibrium between the positional and the statistical error in an unsupervised form using Gaussian Kernel density functions. The validity of the method has been tested using APT simulated data of semiconductor materials. It has been proved that the chemical quantification in these materials requires the appropriate selection of the smoothing parameter, obtained without user intervention. In addition, the results have been compared to the usual techniques for composition measurement from APT data (voxelization and proximity histograms), showing better precision for high spatial resolution. This work supplies a data driven methodology based in Gaussian Kernel density functions for the accurate quantification of the composition from APT data.
Keywords:
Atom probe tomography
Nanocharacterization
Sampling
Simulation
Data mining
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