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Heterogeneous integrated phase modulator based on two-dimensional layered materials
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DOI：10.1364/PRJ.453520.png)
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Abstract
En 中文
Silicon nitride, with ultralow propagation loss and a wide transparency window, offers an exciting platform to explore integrated photonic devices for various emerging applications. It is appealing to combine the intrinsic optical properties of two-dimensional layered materials with high-quality optical waveguides and resonators to achieve functional devices in a single chip. Here we demonstrate a micro-ring resonator-based phase modulator integrated with few-layer MoS2. The ionic liquid is employed directly on the surface of MoS2 to form a capacitor configuration. The effective index of the composite MoS2-SiN waveguide can be modulated via adjusting bias voltages to achieve different charged doping induced electro-refractive responses in MoS2 film. The maximum effective index modulation of the composite MoS2-SiN waveguide can be achieved to 0.45 x 10(-3). The phase tuning efficiency is measured to be 29.42 pm/V, corresponding to a V pi L of 0.69 V.cm. Since the micro-ring resonator is designed near the critical coupling regime, the coupling condition between the bus waveguide and micro-ring resonator can also be engineered from under-coupling to over-coupling regime during the charged doping process. That can be involved as a degree of freedom for the coupling tailoring. The ability to modulate the effective index with two-dimensional materials and the robust nature of the heterostructure integrated phase modulator could be useful for engineering reliable ultra-compact and low-power-consumption integrated photonic devices. (C) 2022 Chinese Laser Press
Keywords:
MACH-ZEHNDER MODULATOR
ELECTROOPTIC MODULATOR
GRAPHENE
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