High-accuracy deflectometric microscope system with a large slope range

doi:10.1364/OL.420447

High-accuracy deflectometric microscope system with a large slope range

2021-04-19

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DOI：10.1364/OL.420447

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We propose an off-axis deflectometric microscope system for microscopic surface testing with both high measurement accuracy and a large slope dynamic range. A high-luminance liquid crystal display directly illuminates the tested sample with coded fringes, and then the reflected fringes passing through a microscope objective are captured by a pinhole camera, from which the deflectometric microscopic testing with a large slope range can be achieved. The accuracy of the proposed system is validated numerically and experimentally, and a large measurable slope dynamic range is also demonstrated. The proposed system provides a feasible way with the slope range in the order of sub-radians and sag resolution better than 0.05 nm. (C) 2021 Optical Society of America

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SHAPE MEASUREMENT

MICRODEFLECTOMETRY

High-accuracy deflectometric microscope system with a large slope range

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