High-resolution micromachined interferometric accelerometer

doi:10.1063/1.126637

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High-resolution micromachined interferometric accelerometer

2000-05-29

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DOI：10.1063/1.126637

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Abstract

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We demonstrate a promising type of microfabricated accelerometer that is based on the optical interferometer. The interferometer consists of surface-micromachined interdigital fingers that are alternately attached to a proof mass and support substrate. Illuminating the fingers with coherent light generates a series of diffracted optical beams. Subangstrom displacements between the proof mass and frame are detected by measuring the intensity of a diffracted beam. The structure is fabricated with a two-mask silicon process and detected with a standard laser diode and photodetector. We estimate that the minimum detectable acceleration is six orders of magnitude below the acceleration of gravity, i.e., 2 mu g/root Hz in a 1 Hz bandwidth centered at 650 Hz. (C) 2000 American Institute of Physics. [S0003-6951(00)02122-7].

Keywords:

HIGH-SENSITIVITY

TUNNELING ACCELEROMETER

MINIATURE

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