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High-Sensitivity Inductive Pressure Sensor
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DOI：10.1109/TIM.2011.2118910.png)
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Abstract
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A new type of pressure sensors with extremely high sensitivity is introduced. Unlike piezoresistive, capacitive, and linear-variable-differential-transformer-based pressure sensors, the new sensor is based on a technique for substantially changing the inductance of a coil. The prototype device has demonstrated a change in inductance of approximately 34.5 mH over a pressure range of 10 kPa. The sensor offers a number of desirable features, including linearity, low temperature, and pressure hysteresis, in addition to small size.
Keywords:
Inductance-to-frequency converter
pressure hysteresis
pressure sensor
relative permeability
temperature hysteresis
variable inductance
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