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High-Speed and High-Brightness 850 and 1060 nm VCSEL Arrays for Free-Space Optical Communication
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DOI：10.1109/jstqe.2026.3700451.png)
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Abstract
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Vertical-cavity surface-emitting laser (VCSEL) arrays featuring high-speed and exceptional brightness are critical for minimizing diffraction loss on the receiver side of optical wireless communication (OWC) channels, especially in 6G and satellite communications. Compared with their edge-emitting counterpart, such as DFB lasers, VCSELs typically offer stronger radiation hardness. However, the traditional high-power, high-brightness, and (quasi-) single-mode (SM) VCSELs frequently experience pronounced relative intensity noise (RIN) and spatial hole burning effects, both of which limit their effectiveness for high-speed data transmission. This paper demonstrates Zn-diffusion VCSEL arrays with a novel ring-shaped aperture and a compact dual-pad layout at both 850 and 1060 nm wavelengths, fundamentally resolving the trade-offs among the SM output power, brightness, RIN, and modulation speed. Compared to the traditional 7 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$ \times $</tex-math></inline-formula> 7 VCSEL arrays employing circular Zn-diffusion apertures at the 850 nm wavelength, the new ring-shaped aperture exhibits higher (quasi-) SM output power (160 vs. 145 mW), higher brightness (73 and 66 KWcm<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">−2</sup>sr<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">−1</sup>), and a wider 3-dB E-O bandwidth (22 vs. 17 GHz). Clear and error-free 32 Gbit/sec eye-opening over free-space transmission can be measured. The remarkable static/dynamic performance of our array can be attributed to the suppression of spatial hole burning effect in the ring-shaped aperture. Moreover, the application of a similar device structure and dual-pad layout to 1060 nm VCSELs results in comparable high-power, high-brightness, and high-speed error-free 26 Gbit/sec free space transmission performance.
Keywords:
Semiconductor lasers
vertical-cavity surface emitting lasers (VCSEL)
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