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Humidity-Independent NO2 Gas Sensors Based on CeO2/ZnO/WO3 Heterostructure Films Fabricated by Template-Assisted Magnetron Sputtering
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DOI：10.1021/acssensors.6c00076.png)
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Abstract
En 中文
The detection of trace nitrogen dioxide (NO2) in port atmospheres is crucial for protecting occupational health and maintaining air quality in coastal cities. Nonetheless, the reliable monitoring of NO2 remains a challenge in complex environments featuring high humidity, diverse gas compositions, and dynamically fluctuating concentrations, which impose substantial interference. Here, the NO2 sensors based on the CeO2/ZnO/WO3 (CZWT) heterostructure films were fabricated via the template-assisted magnetron sputtering. The optimal device exhibited outstanding NO2 sensing performance at 280 °C with high response (81.69 to 50 ppm NO2), rapid response/recovery rate (25/10 s), ultralow detection limit (10 ppb), ideal selectivity, and excellent long-term stability (90 days). Further investigations suggested that the exceptional hydrophobicity of the CZWT heterostructure film and the dynamic Ce3+/Ce4+ redox cycle endowed the sensors with humidity-tolerant response properties. In parallel, a wireless gas-detection device was developed to achieve the monitoring of NO2 in humid environments. This work demonstrates an effective approach for designing humidity-independent MOS gas sensors.
Keywords:
Heterostructures
Humidity
Oxides
Sensors
Thermodynamic properties
metal oxide semiconductors
gas sensor
NO2
CeO2/ZnO/WO3 heterostructure films
humidity tolerance
Journal
IF:
9.1
Papers:
976
Citations:
2.6W