Imaging with solid immersion lenses, spatial resolution, and applications

doi:10.1109/5.883320

Imaging with solid immersion lenses, spatial resolution, and applications

2000-09-01

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DOI：10.1109/5.883320

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Abstract

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Solid immersion microscopy, similar to liquid immersion microscopy, extends the diffraction limit by filling the object space with a high refractive index material, such as glass (index of refraction n = 1.5-2), sapphire (n similar to 1.8), and semiconductor materials (n similar to 3), which Shrink the wavelength of light. Bur solid immersion technique achieve significantly higher spatial resolution since the refractive indices of available solids can be much higher than those of liquids (n = 1.3-1.5). Besides high spatial resolution, solid immersion microscopy also possesses all the good properties of far-field imaging, such as high transmission efficiency and parallel imaging capability, which make it outstanding among beyond-the-diffraction-limit optical imaging techniques. In this paper we discuss, from an experimental point of view, the resolution limit of solid immersion microscopy and the implementation of such technique in various applications.

Keywords:

achromatic imaging

data storage

diffraction limit

evanescent imaging

fluorescent microscopy

gallium phosphide

high numerical aperture

high resolution imaging

high throughput

near-field imaging

photolithography

resolution multiplier

solid immersion lens

solid immersion microscopy

Imaging with solid immersion lenses, spatial resolution, and applications

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