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Integrated simulation and experimental investigation on aspect ratio enhancement in fabricating micro-features on quartz ceramic via abrasive-assisted rotary electrochemical discharge machining process
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DOI：10.1007/s10800-026-02470-x.png)
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Abstract
En 中文
The escalating demand for highly miniaturized and high-performance components in the fields of microelectronics, biomedical systems, and photonics drove the need for advanced micromachining technologies capable of fabricating precise micro-holes in advanced engineering ceramic materials such as quartz ceramics. This study investigated the performance of an abrasive-assisted rotary electrochemical discharge machining process for the fabrication of high-aspect-ratio micro-holes in quartz substrates. An in-house facility was developed that integrated synchronized tool rotation and abrasive circulation mechanisms for experimentation, and the effects of key input parameters, such as applied voltage, feed rate, and electrolyte solution, were systematically evaluated based on machining characteristics, including surface roughness and aspect ratio of the fabricated micro-holes. The primary aim of this research work was to perform a systematic comparative analysis among three different process variants: the conventional electrochemical discharge machining process, the rotary electrochemical discharge machining process, and the abrasive-assisted rotary electrochemical discharge machining process. Simulation and theoretical analysis of electric field distribution showed that abrasive assistance produced approximately 298% stronger electric field coverage, which led to more efficient machining compared with the conventional electrochemical discharge machining approach. Experimental outcomes demonstrated that the abrasive-assisted rotary process significantly enhanced cutting rate, spark stability, surface integrity, and achievable aspect ratios, reaching a value of 7.3. This comprehensive comparative investigation validated the capability of the proposed hybrid micromachining process to produce high-precision, deep micro-features in brittle, non-conductive ceramics, making it suitable for next-generation microsystem fabrication. [GRAPHICS]
Keywords:
Abrasive-assisted rotary ECDM
Micromachining
Thermal simulation modelling
Aspect ratio
Hybrid machining
Quartz ceramic
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